Overview

The Stanford Microfluidics Foundry is a ~1000 square foot class 10,000 clean room that consists of two main area: an inner room dedicated to photolithographic production of microfluidic molding masters and an outer room dedicated to production and testing of microfluidic devices produced via soft lithography.

 

Mold Fabrication Equipment

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Wet bench processing hood #1

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Wet bench processing hood #2

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Photoresist spinners

Torrey Pines programmable hot plates

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Karl Suss MA6 mask aligner

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Photoresist development hood

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Wafer inspection stereoscope

 

Device fabrication equipment

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Wafer silanization hood

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Convection oven

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Profilometer

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THINKY centrifugal mixer

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Device inspection stereoscope

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Pneumatic manifold for device testing

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PDMS spin coater

Micro drill press for hole punching

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PDMS spin coater

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Plasma cleaner